来源:
《安全与电磁兼容》2003年第3期
作者:盛松林 刘尚合 胡小峰(39)
国外ESD相关电磁场实验研究现状及其进展
Review of Foreign Experiment Investigation on EM-Fields Related to ESD
摘要 随着点钟微电子技术的发展,ESD(静电放电)危害问题越来越严重,国外已经开始对ESD电磁场进行全面的研究。文章介绍了国外学者常用的测量方法及其研究进展状况,这些对于我国开展ESD电磁场研究具有重要意义。
关键词 ESD 电磁场 测量
Abstract As the rapid evolution of micro-electronics technology, the hazards from ESD (Electro-static Discharge) became more and more serious, and meanwhile foreign
scholars have conducted comprehensive research on ESD EM-fields. Their measurement
methods and development prospect are introduced, which are very helpful for ESD EM-
fields research in China.
Keywords ESD, electromagnetic field, measurement